P506 – PGM HINESS HEPS IHEP CAS
Application
Plane grating monochromator (PGM) for soft X-ray synchrotron radiation
Year of delivery
2024
Installation site
HINESS beamline at High Energy Photon Source, Institute of High Energy Physics, China
Design Features
- Plane grating monochromator (PGM).
- Spectral range: 90 – 2000 eV.
- Optical elements: one plane mirror and four plane gratings.
- Temperature sensors at internal mechanics, mirror and gratings holders.
- Active water cooling of all optical elements.
-
Combined drives with piezo actuator and stepper motor for ultra-high mirror / grating pitch positioning resolution over the entire motion range.
- Mechanically decoupled internal mechanics from the vacuum chamber.
- Internal mechanics directly connected to the adjustable support structure underneath.
-
EtherCAT based motion control system for piezo and stepper motor driven axes, synchronized encoder readout, software with server-client architecture, TCP-IP protocol, EPICS interface.
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Water cooled zero-order stop with mask.
- Adjustable support structure.
- Permanently installed bakeout provisions.
Performance Features
- Ultra-high positioning resolution.
- High pitch rotation stability and repeatability.
- Minimized mounting induced deformations.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, vertical axis
Main flanges
at the top
Material
1.4404 (C < 0.02%)
Base pressure
10-10 mbar range
Optical design parameters
Beam height (entrance)
1400 mm
Beam offset
20 mm
Number of plane mirrors
1
Plane mirror dimensions
430 mm x 50 mm x 60 mm
Number of gratings
4
Gratings dimensions
150 mm x 40 mm x 50 mm
Support structure
Adjustment ranges
Vertical translation
>± 10 mm
Horizontal translation
>± 10 mm
Pitch
>± 1°
Roll
>± 1°
Yaw
>± 1°
Plane mirror
Pitch rotation
Range
-0.52° to +10.23°
Resolution (design value)
0.005 µrad /motor fine step
(1/256, recommended)
0.00146 µrad /encoder count
Resolution (measured value)
0.04 µrad
Repeatability
0.13 µrad (pitch)
0.22 µrad (roll)
Long-term stability (2h)
0.030 µrad
Long-term stability (> 2h)
1 l/min water flow rate
0.050 µrad
Long-term stability (> 2h)
2 l/min water flow rate
0.053 µrad
Scanning speed
1 mrad /s
Gratings
Pitch rotation
Range
-0.50° to +10.21°
Resolution (design value)
0.00625 µrad /motor fine step
(1/256, recommended)
0.00146 µrad /encoder count
Resolution (measured value)
0.04 µrad
Repeatability
0.09 µrad (pitch)
0.08 µrad (roll)
Long-term stability (1.5 h)
0.020 µrad
Long-term stability (> 2h)
1 l/min water flow rate
0.026 µrad
Long-term stability (> 2h)
2 l/min water flow rate
0.026 µrad
Scanning speed
1 mrad /s
Translation
Range
-102.19 mm to +102.13 mm
Resolution (design value)
0.013 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Repeatability
0.05 µrad (pitch)
0.06 µrad (roll)
Scanning speed
2 mm /s
Performance Test Results
Pitch deviation after pitch change (mirror)
Roll deviation after pitch change (mirror)
Pitch deviation after pitch change (grating)
Roll deviation after pitch change (grating)
Pitch deviation after grating translation
Roll deviation after grating translation
Mirror pitch positioning resolution
Mirror pitch step width
Grating pitch positioning resolution
Grating pitch step width
Mirror pitch long-term stability
Grating pitch long-term stability
Mirror pitch long-term stability
(1 l/min water flow rate)
Grating pitch long-term stability
(1 l/min water flow rate)
Mirror pitch long-term stability
(2 l/min water flow rate)
Grating pitch long-term stability
(2 l/min water flow rate)
Scanning speed of mirror pitch
Scanning speed of grating pitch
Scanning speed of grating translation
Residual gas analysis
