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P463 – Secondary Source Slits I22 DLS
Application
Secondary source slits for hard X-ray synchrotron radiation
Year of delivery
2017
Installation site
Beamline I22 at Diamond Light Source, Didcot, United Kingdom
Design Features
-
Double slit mechanism – vertically and horizontally defining slits.
-
Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- Tungsten slit blades.
- Motorized and encoded slit unit vertical translation.
- Motorized and encoded slit unit translation transversal to beam axis.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 100 nm.
- Parallelism smaller than 0.35 µm over 10 mm edge length.
- Straightness smaller than 0.5 µm over 10 mm edge length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Translation transversal
to beam axis
Range
± 10 mm
Stability (>15h)
0.025 µm
Resolution (design value)
0.025 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Vertical translation
Range
± 10 mm
Long-term stability (15h)
0.06 µm
Resolution (design value)
0.40 µm /step
(full step at actuator)
0.08 µm /step
(full step at wedge leveler)
0.005 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Horizontally defining slit (HDS)
Slit blades
Material
Tungsten
Straightness
< 0.20 µm over 10 mm (1σ)
Parallelism
-0.003 µm /mm
(10 µm slit opening)
0.03 µm /mm
(50 µm slit opening)
0.03 µm /mm
(100 µm slit opening)
Slit opening
Range
5 µm to 8.2 mm
Repeatability
± 0.07 µm
(up to 235 µm slit opening)
Long-term stability (> 3h)
0.04 µm
Min. incremental
movement
≤ 0.2 µm at <200 µm
Resolution (design value)
0.0016 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
0.12 µm
Vertically defining slit (VDS)
Slit blades
Material
Tungsten
Straightness
< 0.25 µm over 10 mm (1σ)
Parallelism
-0.09 µm /mm
(10 µm slit opening)
-0.01 µm /mm
(50 µm slit opening)
-0.01 µm /mm
(100 µm slit opening)
Slit opening
Range
5 µm to 8.2 mm
Repeatability
± 0.03 µm
(up to 320 µm slit opening)
Long-term stability (> 4h)
0.02 µm
Min. incremental
movement
≤ 0.2 µm at <200 µm
Resolution (design value)
0.0016 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
0.17 µm