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P398 - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
P398 - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH

P398 – Exit Slit Unit I21-IXS DLS

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2015

Installation site

Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom

Design Features

  • Three independent slit opening mechanisms – two vertically and one horizontally defining slits.

  • Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.

  • Tungsten slit blades.
  • Motorized and encoded slit unit translation along beam axis.
  • Metal plate with adjustable YAG screen.
  • Adjustable support structure.

Performance Features

  • Precision and slit opening repeatability smaller than 100 nm.
  • Parallelism smaller than 0.8 µm over 10 mm edge length.
  • Straightness smaller than 0.5 µm over 10 mm edgle length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P398 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-10 mbar range

Translation along beam axis

Range

± 250 mm

Resolution (design value)

0.015 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count

Chamber roll

± 25 µrad
(over 500 mm translation)

Horizontally defining slit (HDS)

Slit blades

Material

Tungsten

Straightness

< 0.10 µm over 10 mm (1σ)

Parallelism

-0.07 µm /mm
(10 µm slit opening)
-0.05 µm /mm
(25 µm slit opening)
-0.01 µm /mm
(50 µm slit opening)

Slit opening

Range

0.6 µm to 10 mm

Repeatability

± 0.20 µm
(up to 400 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Vertically defining slit (VDS 1)

Slit blades

Material

Tungsten

Straightness

< 0.30 µm over 10 mm (1σ)

Parallelism

-0.009 µm /mm
(10 µm slit opening)
-0.004 µm /mm
(25 µm slit opening)
-0.04 µm /mm
(50 µm slit opening)

Slit opening

Range

3 µm to 10 mm

Repeatability

± 0.33 µm
(up to 400 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Vertically defining slit (VDS 2)

Slit blades

Material

Tungsten

Straightness

< 0.20 µm over 10 mm (1σ)

Parallelism

-0.04 µm /mm
(10 µm slit opening)
-0.02 µm /mm
(25 µm slit opening)
-0.03 µm /mm
(50 µm slit opening)

Slit opening

Range

3 µm to 10 mm

Repeatability

± 0.28 µm
(up to 430 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Performance Test Results

Slit width calibration (HDS)
P398 - Slit width calibration (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit opening repeatability (HDS)
P398 - Slit opening repeatability (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (HDS)
P398 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (HDS)
P398 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (HDS)
P398 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit width calibration (VDS 1)
P398 - Slit width calibration (VDS1) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit opening repeatability (VDS 1)
P398 - Slit opening repeatability (VDS1) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (VDS 1)
P398 - Slit blades parallelism (VDS1) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (VDS 1)
P398 - Slit blades parallelism (VDS1) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (VDS 1)
P398 - Slit blades parallelism (VDS1) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit width calibration  (VDS 2)
P398 - Slit width calibration (VDS2) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit opening repeatability (VDS 2)
P398 - Slit blades parallelism (VDS2) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (VDS 2)
P398 - Slit blades parallelism (VDS2) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (VDS 2)
P398 - Slit blades parallelism (VDS2) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Slit blades parallelism (VDS 2)
P398 - Slit blades parallelism (VDS2) - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH
Residual gas analysis
P398 - Residual gas analysis - Exit slit unit for soft X-ray synchrotron radiation at Beamline I21-IXS at Diamond Light Source, Didcot, United Kingdom - Bestec GmbH